Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

Efficient fabrication of high quality SU-8 photoresist based microsphere lasers via emulsion

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

A New Route for Fabricating Polymer Optical Microcavities.

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Real 3D microsphere lasers by femtosecond laser processing

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

SU-8 Lenses: Simple Methods of Fabrication and Application in Optical Interconnection Between Fiber/LED and Microstructures

Fabricating SU-8 Photoresist Microstructures with Controlled Convexity–Concavity and Curvature through Thermally Manipulating Capillary Action in Poly(dimethylsiloxane) Microholes

Femtosecond Laser Rapid Prototyping of Nanoshells and Suspending Components Towards Microfluidic Devices

High-Q and highly reproducible microdisks and microlasers.

Fabrication of SU-8 Photoresist Micro–nanofluidic Chips by Thermal Imprinting and Thermal Bonding

Two-photon Polymerization Fabrication and Raman Spectroscopy Research of SU-8 Photoresist Using the Femtosecond Laser

Laser emission from dye doped microspheres produced on a chip

Femtosecond Laser Processing of Microcavity Lasers

Improved performance in microsphere-assisted 2D and 3D imaging by polystyrene microspheres semi-immersed in SU-8 resist

Optical Fabrication and Characterisation of SU-8 Disk Photonic Waveguide Heterostructure Cavities.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists

Ultrafast Laser in Fabrication of Micro Hemispherical Resonators with Quality Factor over Millions