Flexible field-effect transistors with high-quality and uniform single-layer graphene for high mobility

Hyunjin Park,Jimin Kwon,Jihyung Seo,Kiho Kim,Yun Ho Kim,Sungjune Jung
DOI: https://doi.org/10.1088/1361-6641/ad3111
IF: 2.048
2024-03-09
Semiconductor Science and Technology
Abstract:In this work, a fully flexible graphene field-effect transistor with high carrier mobility is reported. Patterned high-quality and uniform single-layer graphene films are successfully realized by combining the selective growth on a patterned copper foil and the direct transfer method to minimize degradation factors. The selectively grown single-layer graphene is directly transferred to the target substrate through the deposition of poly-para-xylylene (Parylene) C. The quality of the graphene films is confirmed by Raman spectroscopy. The analysis reveals that the use of Parylene C as the substrate, gate dielectric, and encapsulation layer has the advantage of reducing the scattering by the optical phonons and charge puddles. The estimated residual carrier density is 1.72 × 1011 cm−2, and the intrinsic hole and electron carrier mobilities are found to be as high as 10260 and 10010 cm2·V−1·s−1, respectively. This study can pave the way for the development and mass production of high-performance and fully flexible graphene electronics.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter
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