Ultra-sensitive LC MEMS for bladder pressure monitoring using modified slotted diaphragm

L. Tahar,,K. Malika,
DOI: https://doi.org/10.15251/djnb.2024.191.351
2024-03-26
Digest Journal of Nanomaterials and Biostructures
Abstract:In this paper, we have designed and simulated an implantable MEMS-based LC pressure sensor for bladder pressure monitoring. The device is composed of metal-insulator-metal capacitive sensor in which the size of the diaphragm is 1 mm × 1 mm of 5 μm thickness. Besides, novel modified-slotted diaphragm is developed to improve the sensitivity by decreasing the mechanical rigidity of the membrane. We used the COMSOL Multiphysics a tool for design and simulation. According to the results, the frequency response to the variable pressure is varied within the range of 35.23 to 119.72 MHz, the results also yield a value obtained of the quality factor is worth 32 with high value of 4.22 kHz/Pa sensor sensitivity. Hence, this sensor with a novel modified-slotted diaphragm has a high-pressure sensitivity, which shows 2.91 times more sensitivity than clamped diaphragm.
materials science, multidisciplinary,nanoscience & nanotechnology
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