An Ultra-Low Frequency and Low-Pressure Capacitive Blood Pressure Sensor Based on Micro-Mechanical Resonator

Amin Eidi

DOI: https://doi.org/10.1007/s11220-022-00398-y

2022-11-08

Sensing and Imaging

Abstract:In this paper, by combining a high dielectric capacitor and a low frequency resonator, a pressure sensor capable of measuring extremely low frequencies is designed. By using a material with a high dielectric coefficient, a high capacitance value is created for the proposed capacitive sensor. Also, in this sensor to record very low frequencies, a material with a low stiffness coefficient is used for the mechanical resonator. The proposed sensor is designed to work at voltages less than 2 volts, and the micrometer dimensions are designed so that it can be used as an implantable pressure sensor with a series of additional tasks. The materials used in this design have been selected according to the possibility of using them in the fabrication of micro-electromechanical systems. HfO2, TiO2, CCTO as materials with high dielectric coefficient have been studied in this work and their results have been reported. Also, PTFE as a material with low Young's modulus is used as the resonator plate of the proposed microplate sensor. In this work, a special structure is designed according to the standard microsystems fabrication methods and its mathematical model is reported and analyzed. The performance simulation results of the proposed sensor are presented with the help of COMSOL to evaluate it.

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