Abstract:Flexible capacitive pressure sensors play a crucial role in wearable electronics and robotics. However, their susceptibility to environmental noise poses challenges to sensing precision. To mitigate the impact of environmental influences, a sensor capable of producing signals orders of magnitudes larger than the noise becomes essential. One straightforward method to enhance capacitance values involves reducing the thickness of the dielectric layer. Yet, when this reduction reaches nanometer scale, the dielectric layer may become mechanically vulnerable and more importantly, their charge storage capability is compromised due to electron tunneling. To address these challenges, here the naturally formed alumina (Al2O3) on aluminum (Al) surface is employed as a stable and ultra-thin dielectric layer. Simultaneously, the Schottky effect at the Al-Al2O3-carbon black (CB) interface is harnessed to prevent electron tunneling. These strategies collectively yielded a large unit-area capacitance (UAC) of 50 nF cm-2 and demonstrated high electrical and environmental stability. Furthermore, hollow hemispherical microstructures are incorporated at the interface, resulting in a flexible pressure sensor with high sensitivity (8.6 kPa-1) and a linear response up to 50 kPa. With its simple two-layer structure, this sensor can be seamlessly integrated in situ and offers commercial-grade resolution at mN-level for monitoring human biomechanical signals. The Schottky effect at the junction between a semiconductor and a conductor is harnessed to mitigate tunneling current across the nanometer-scale dielectric layer. This strategy facilitates the creation of a frequency-independent interface with ultrahigh unit-area capacitance. Further construction of microstructures at this interface yields a flexible pressure sensor with high sensitivity, wide linear range, and environmental stability. image

A Capacitive Pressure Sensor Based on LTCC/PDMS Bonding Technology

A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology

A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

Microfabrication Of A Novel Ceramic Pressure Sensor With High Sensitivity Based On Low-Temperature Co-Fired Ceramic (Ltcc) Technology

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors

A High-Performance Lc Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (Ltcc) Technology

A Wireless Pressure Microsensor Fabricated In Htcc Technology For Dynamic Pressure Monitoring In Harsh Environments

High sensitivity capacitive flexible pressure sensor based on PDMS double wrinkled microstructure

A Flexible and Highly Sensitive Capacitive Pressure Sensor with Fast Response based on a Hierarchically Micro-structured PDMS Dielectric Layer

A flexible capacitive pressure sensor based on an electrospun polyimide nanofiber membrane

Design of Capacitive Pressure Sensors Integrated with Anisotropic Wedge Microstructure-Based Dielectric Layer

A New Strategy for the Fabrication of a Flexible and Highly Sensitive Capacitive Pressure Sensor

Enhancing sensitivity in wireless capacitive pressure sensors via highly flexible LC circuits utilizing porous polydimethylsiloxane dielectric layer

Design and Fabrication of an Absolute Pressure MEMS Capacitance Vacuum Sensor Based on Silicon Bonding Technology

Biomimetic-inspired Highly Sensitive Flexible Capacitive Pressure Sensor with High-Aspect-ratio Microstructures

A Novel Capacitive-Based Flexible Pressure Sensor Based On Stretchable Composite Electrodes And A Dielectric Elastomer With Microstructures

Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation

The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode

High-performance capacitive pressure sensors Fabricated by introducing dielectric filler and conductive filler into a porous dielectric layer through a Biomimic strategy

Low-Cost, Flexible Annular Interdigital Capacitive Sensor (faics) with Carbon Black-Pdms Sensitive Layer for Proximity and Pressure Sensing

Schottky Effect‐Enabled High Unit‐Area Capacitive Interface for Flexible Pressure Sensors