Abstract:Current flexible/compliant tactile sensors suffer from low sensitivity and high hysteresis introduced by the essential viscosity characteristic of soft material, either used as compliant sensing element or as flexible coverage. To overcome these disadvantages, this paper focuses on developing a tactile sensor with a smart hybrid structure to obtain comprehensive properties in terms of size, compliance, robustness and pressure sensing ability so as to meet the requirements of limited space applications such as prosthetic fingertips. Employing micro-fabricated tiny silicon-based pressure die as the sensing element, it is easy to have both small size and good mechanical performance. To protect it from potential damage and maintain the compliant surface, a rigid base and a soft layer form a sealed chamber and encapsulate the fixed die together with fluid. The fluid serves as highly efficient pressure propagation media of mechanical stimulus from the compliant skin to the pressure die without any hazard impacting the vulnerable connecting wires. To understand the pressure transmission mechanism, a simplified and concise analytic model of a spring system is proposed. Using easy fabrication technologies, a prototype of a 3 x 3 sensor array with total dimensions of 14mm x 14mm x 6.5mm was developed. Based on the quasi-linear relationship between fluid volume and pressure, finite element modeling was developed to analyze the chamber deformation and pressure output of the sensor cell. Experimental tests of the sensor prototype were implemented. The results showed that the sensor cell had good sensing performance with sensitivity of 19.9 mV N-1, linearity of 0.998, repeatability error of 3.41%, and hysteresis error of 3.34%. The force sensing range was from 5 mN to 1.6 N.

Development of a CMOS MEMS Pressure Sensor with a Mechanical Force-Displacement Transduction Structure

Mechanical Force-Displacement Transduction Structure for Performance Enhancement of CMOS-MEMS Pressure Sensor

Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor

Sensitivity Improvement for CMOS-MEMS Capacitive Pressure Sensor Using Double Deformarle Diaphragms with Trenches

A MEMS capacitive pressure sensor compatible with CMOS process

CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement

Smart structure with elastomeric contact surface for prosthetic fingertip sensitivity development

The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode

Design and Application of a Metal Wet-Etching Post-Process for the Improvement of CMOS-MEMS Capacitive Sensors

Wafer-Level Self-Packaging Design and Fabrication of MEMS Capacitive Pressure Sensors

Vertically Integrated Multiple Electrode Design For Sensitivity Enhancement Of Cmos-Mems Capacitive Tactile Sensor

Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity

Design of A Novel CMOS Capacitive Absolute Pressure Sensor

A novel cmos-mems tri-axial tactile force sensor using capacitive and piezoresistive sensing mechanisms

A High Sensitive Pressure Sensor with the Novel Bossed Diaphragm Combined with Peninsula-Island Structure

Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity Improvement

Monolithic Integration of Capacitive Sensors Using A Double-Side Cmos Mems Post Process

Prefabrication design, theoretical framework and simulation demonstration of a meander-shaped MEMS piezoresistive pressure sensor implanted on silicon substrate circular diaphragm for enhancement of key performance parameters utilized for low-pressure applications

The Development of a New Piezoresistive Pressure Sensor for Low Pressures

A Novel Capacitive Pressure Sensor Based on Sandwich Structures

Vertical Integration of Capacitive and Piezo-Resistive Sensing Units to Enlarge the Sensing Range of CMOS-MEMS Tactile Sensor