Miniaturized Flexible Temperature Sensor

Yves Moser,Martin A. M. Gijs
DOI: https://doi.org/10.1109/jmems.2007.908437
IF: 2.829
2007-12-01
Journal of Microelectromechanical Systems
Abstract:We realize a flexible temperature sensor based on a micropatterned thin-film platinum resistor. The sensor is situated at the end of a 100-$muhbox{m}$-wide and 7-cm-long probe. The latter consists of a biocompatible high-temperature-resistant polyimide (U-Varnish-S, UBE Industries, Tokyo, Japan) in which the platinum resistor and the electrical contact leads are embedded. The sensor is operational from 0 °C up to 400 °C and has a time constant of less than 80 ms. Such a sensor can potentially be used to characterize the thermo-ablation process of tumors using hot steam injection via a microtube. $hfill$[2007-0147]
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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