A Temperature Sensor Array Based on Flexible MEMS Skin Technology

XIAO Su-yan,CHE Lu-feng,LI Xin-xin,WANG Yue-lin
DOI: https://doi.org/10.3321/j.issn:1004-924x.2005.06.009
2005-01-01
Optics and Precision Engineering
Abstract:A 8×8 array platinum film resistor temperature sensor on polyimide flexible substrate was successfully fabricated based on MEMS skin technology.The flexible polyimide substrate were formed by spin-coating liquid polyimide on a thermally oxidized silicon wafer.The wafer was used as a mechanical carrier for the flexible substrate during device fabrication.The finished flexible devices were finally separated from the carrier by wet etching.The test results show that the platinum film resistor temperature sensors on polyimide substrates exhibit excellent linearity and the temperature coefficient of resistance is close to 0.0023/℃.The spin-coated liquid polyimide solves two major problems comparing with the solid polyimide sheets as a flexible substrate.First,flatness of the flexible substrate is maintained with no air bubbles between the interface of ployimide and silicon.Second,the thermal expansion of the flexible substrates during the fabrication process due to thermal cycling is reduced greatly.The flexible skin with a temperature sensor array can be easily attached on a highly curved surface to detect temperature distribution inside a small area.
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