Integrated optical phased array at 2μm wavelength band on silicon

Li Dongliang,Li Zhiyu,Liu Yingjie,Xu Ke

DOI: https://doi.org/10.1117/12.2625545

2022-01-01

Abstract:A 1x8 silicon optical phased array at 2 lam wavelength band is experimentally demonstrated. The optical phased array can achieve a steering angle of +/- 31 degrees in the psi axis through the thermo-optic effect.

What problem does this paper attempt to address?

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

zhaoyang zhang,zhiyan zhou,yuehai wang,jianyi yang

DOI: https://doi.org/10.1117/12.2624750

2022-01-01

Abstract:We demonstrate a 63-channel grating-lobe-free optical phased array, in which end-fire antennas were fabricated with a pitch of 775 nm to eliminate grating lobe. Phase mismatch was configured to suppress the optical crosstalk in the dense waveguides. Two-dimensional beam steering within 16°× 2.7° were presented by thermal phase shifting and wavelength tuning.
Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Zhaoyang Zhang,Tingge Dai,Qiang Zhang,Qikai Huang,Hui Yu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.2645523

2022-01-01

Abstract:We demonstrate 32-channel dispersive optical phased arrays on a Si3N4-on-SOI integration platform. The phase difference is introduced by the arrayed waveguide. Beam steering in phased-array direction with an aliasing-free range of 22.4 degrees and free spectrum ranges of similar to 60 nm and similar to 6 nm is achieved. Meanwhile, the main lobe is deflected simultaneously by 19.67 degrees in the other direction by tuning the wavelength from 1500 nm to 1630 nm. Measurement results show that the dispersive optical phased array provides a compact, low-power and massively parallel solution for LiDAR applications.
Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Jingye Chen,Yanling Sun,Shijie Wei,Xiang'e Han,Yaocheng Shi

DOI: https://doi.org/10.1109/oecc.2018.8729918

2018-01-01

Abstract:An 1 × 8 optical phased array on silicon-on-insulator platform is proposed and demonstrated. Silicon waveguides with non-uniform widths enable beam steering with compressed high order grating lobes.
Millimeter-Long Silicon Photonic Antenna for Optical Phased Arrays at 2-μm Wavelength Band

Li Dongliang,Liu Yingjie,Song Qinghai,Du Jiangbing,Xu Ke

DOI: https://doi.org/10.1109/JPHOT.2021.3059844

IF: 2.4

2021-01-01

IEEE Photonics Journal

Abstract:Silicon photonic optical phased arrays are promising solutions for solid-state LIDAR. But the nonlinear absorption significantly saturates the optical power in the waveguides at 1.5-mu m wavelengths. Besides, the high refractive index contrast of silicon grating exhibits a strong diffraction strength of the antenna, which results in a limited aperture of the device. These ultimately place a limit on the detection accuracy and reach. Here, a shallow etched two-dimensional subwavelength grating structure is proposed to improve the efficiency and aperture of the waveguide antenna. A reduction of diffraction strength is achieved via nanohole structure instead of conventional grating lines. Thus, a millimeter-long optical antenna is demonstrated with a peak efficiency of 71%. The far-field diffracted beam width of 0.035 degrees and vertical field-of-view of 17.5 degrees are achieved within 100 nm wavelengths range from 1.95 mu m to 2.05 mu m. The operation at 2-mu m waveband also guarantees better eye-safety and significantly reduces the nonlinear absorption in silicon waveguide compared with conventional 1.5-mu m band.
High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Zhaoyang Zhang,Hui Yu,Qikai Huang,Zhiyan Zhou,Bei Chen,Tingge Dai,Huiye Qiu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2022.3151059

IF: 2.6

2022-03-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a silicon $1 imes 64$ optical phased array by using carrier-depletion-based phase shifters. The 5-mm-long phase shifter exhibits an electro-optic bandwidth of 700 MHz, a modulation efficiency of 2.3 V.cm, and an ultra-low power consumption of < 0.45 nW/$oldsymbol {pi }$ . A steering range of ±18° is realized in the phased-array axis by tuning the phase of each antenna. Besides, the beam steering in the other (wavelength-controlled) axis by tuning the wavelength achieves a dispersion efficiency of 0.17° /nm. Although the carrier-depletion effect induces a nonuniform optical amplitude distribution among the antenna array, the OPA chip is still able to form high-quality far-field beam patterns with side lobe suppression ratios of $oldsymbol {sim }10$ dB. Our measurement and simulation results indicate that the carrier-depletion-based OPA is a promising candidate for future high-speed and power-efficient solid-state Lidars.

engineering, electrical & electronic,optics,physics, applied
A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Zhaoyang Zhang,Hui Yu,Bei Chen,Penghui Xia,Zhiyan Zhou,Qikai Huang,Tingge Dai,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/LPT.2022.3202787

IF: 2.6

2022-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a 1 x 256 optical phased array based on the tri-layer Si3N4-on-Si platform. By optimizing the thickness and vertical position of the Si3N4 overlay, the grating antenna exhibits a ultra-low emission rate of 13.9 dB/cm at 1550 nm and a large bandwidth of 120 nm. Based on the optimized Si3N4 assisted grating antenna, the OPA realizes an ultra-sharp beam divergence of 0.154 degrees x 0.0435 degrees, a two-dimensional beam steering range of 45.6 degrees x 16.1 degrees , and a side lobe suppression ratio better than 10.8 dB.
A Flexible on-chip phase calibration method for optical phased array

Zhiyan Zhou,Zhaoyang Zhang,Hui Yu,Tingge Dai,Jianyi Yang

DOI: https://doi.org/10.1117/12.2651795

2022-01-01

Abstract:We demonstrate a 32-element silicon OPA chip with on-chip phase calibration. The on-chip phase calibration structure consists of interferometric structures and germanium silicon photodetectors (GeSi PDs). This structure can control any angle deflection within the scanning range without detecting the far-field patterns. In the horizontal direction, the on-chip phase calibration structure is used to achieve beam steering within the 36 degrees scanning range, and the side-lobe suppression ratio can be close to 7dB.
Increasing Wavelength-Controlled Steering Range of an Optical Phased Array by Using Two Subarrays.

Qing Wang,Shuxiao Wang,Lianxi Jia,Yan Cai,Wencheng Yue,Mingbin Yu

DOI: https://doi.org/10.1364/ao.422721

IF: 1.9

2021-01-01

Applied Optics

Abstract:We demonstrate an optical phased array that consists of two subarrays based on the silicon on insulator (SOI) platform, each subarray including 16 independent channels. The demonstrated field of view of the optical phased array is 36.6∘×32.6∘ with a spot size of 1.68∘×0.0673∘. A steering range of 32.6° is achieved by combining two subarrays with different periods and tuning the wavelength from 1500 nm to 1600 nm. In another dimension, the steering is realized by introducing phase differences between channels.
Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Zhaoyang Zhang,Qikai Huang,Zhiyan Zhou,Yuehai Wang,Hui Yu,Jianyi Yang

DOI: https://doi.org/10.1364/acpc.2021.t4a.149

2021-01-01

Abstract:We demonstrate a 64-channel optical phased array based on carrier-depletion phase shifters. It offers ultra-high operation speed (0.7GHz phase shifter bandwidth) and ultra-low power consumption $(0.45\text{nW}/\pi)$ , which accelerates beam steering greatly.
Two-dimensional Silicon Optical Phased Array with Large Field of View.

Xiangyu Guo,Zhen Li,Haihong Chen,Yunlong Li,Mengyuan Ye,Xinliang Zhang,Yu

DOI: https://doi.org/10.1364/oe.463043

IF: 3.8

2022-01-01

Optics Express

Abstract:Optical phased array (OPA) is a promising beam steering component for light detection and ranging (LiDAR) systems. For most LiDAR applications, two-dimensional (2D, lateral and longitudinal) beam steering with large field of view is required. To achieve large lateral and longitudinal field of view, waveguide with nonuniform spacing and broadband tunable laser source is commonly utilized, resulting in complex structure and high cost. Here, a 2D OPA with large field of view is proposed and demonstrated on the silicon-on-insulator platform. Assisted by an improved optical antenna and polarization switch, lateral and longitudinal steering range could be both significantly improved. The experimental results show the steering ranges are 99.24° × 15.62° and 96.48° × 16.08° for transverse electric mode and transverse magnetic mode, respectively. The proposed scheme provides a promising approach to realize the integrated OPA with large field of view.
Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Christopher T. Phare,Min Chul Shin,Steven A. Miller,Brian Stern,Michal Lipson

DOI: https://doi.org/10.48550/arXiv.1802.04624

2018-02-13

Abstract:Chip-scale optical phased arrays could enable compact beam steering and LIDAR for autonomous vehicles, precision robotics, and free-space optical communications. Because these applications demand wide angle beam steering as well as high optical power in the output beam, a natural design choice would be to space the array emitters at a half-wavelength pitch, as is common in radiofrequency phased arrays. Optical phased arrays, however, unlike RF phased arrays, have been limited by the tradeoff between field of view (i.e. angle steering) and beamforming efficiency (i.e. optical power in the output beam). This tradeoff exists because optical phased arrays rely on waveguides as emitters, which suffer from strong crosstalk when placed in close proximity relative to their mode size. Here we overcome these limitations and demonstrate a platform for optical phased arrays with 180° field of view, where more than 72 percent of the power is carried in a single diffraction-limited beam even when steered up to 60° off-axis. Our platform leverages high index-contrast, dispersion-engineered waveguides spaced one half-wavelength apart without incurring crosstalk.

Applied Physics,Optics
Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Wenlei Li,Jingye Chen,Dong Liang,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.475350

IF: 3.8

2022-01-01

Optics Express

Abstract:Optical phased array (OPA) based on silicon photonics is considered as a promising candidate for realizing solid-state beam steering. However, the high refractive index contrast of the silicon waveguides leads to conventional silicon based OPA suffering from large random phase errors, which require complex post-processing such as time-consuming phase calibration. We propose and demonstrate a calibration-free silicon OPA with optimized optical waveguides width as well as the compact 90° waveguide bends beyond the single mode regime. By using grouped cascaded phase shifters, it is able to reduce the number of control electrodes from N to log2(N). A 16-channel OPA has been demonstrated with continuous beam steering over the field of view controlled by only four control voltages without any calibration.
Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

Xingyi Jiang,Zhaoyang Zhang,Qikai Huang,Qiang Zhang,Jianyi Yang,Hui Yu

DOI: https://doi.org/10.1364/ofc.2024.th2a.31

2024-01-01

Abstract:We demonstrate dispersive optical phased arrays based on the Si3N4-on-Si platform. Two-dimensional beam steering across a 45.6 °× 10 °FOV with a beam width of 1.45 °× 0.032 °is achieved by wavelength tuning alone. Besides, FMCW ranging operation at a target distance of 10 m are experimentally performed.
An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Zhiyan Zhou,Qikai Huang,Zhaoyang Zhang,Hui Yu,Jianyi Yang,Yuehai Wang

DOI: https://doi.org/10.1109/lpt.2023.3264633

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate an on-chip phase calibration method in the silicon-based optical phased array (OPA) using multimode interferences (MMIs) and germanium silicon photodetectors (GeSi PDs), which are integrated at the end of the grating array. Two groups of MMIs with staggered symmetrical distribution are utilized to obtain the phase difference between adjacent gratings and linked to the PDs. With this method, a $1\times32$ OPA with thirty-two PDs realizes a $36.4^{\circ } \,\, \times11.5^{\circ }$ beam steering range without any blind spot, and the optimal side-lobe suppression ratio is 9.3 dB.
Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

Zhenmin Du,Tingzhao Fu,Minghua Chen,Sigang Yang,Hongwei Chen

DOI: https://doi.org/10.1117/12.2587610

2021-01-01

Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.
Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering

Yu Zhang,Yi-Chun Ling,Kaiqi Zhang,Cale Gentry,David Sadighi,Greg Whaley,James Colosimo,Paul Suni,S J Ben Yoo

DOI: https://doi.org/10.1364/OE.27.001929

2019-02-04

Abstract:This paper reports on large field-of-regard, high-efficiency, and large aperture active optical phased arrays (OPAs) for optical beam steering in LIDAR systems. The fabricated 5 mm-long silicon photonic OPA with a 1.3 μm waveguide pitch achieved adjacent waveguide crosstalk below -12dB. A relatively large and uniform emission aperture has been achieved with a low-contrast silicon nitride assisted grating (~20 dB/cm) whose emission profile can be further optimized using an apodized design. The fabricated silicon-photonic OPA demonstrated > 40° lateral beam steering with no sidelobes in a ± 33° field-of-regard and 3.3° longitudinal beam steering via wavelength tuning by 20 nm centered at 1550 nm. We have fully integrated the silicon photonic OPA device with electronic controls and successfully demonstrated 2-dimensional coherent optical beam steering of pre-planned far-field patterns. Future improvements include placement of a distributed Bragg reflector (DBR) underneath the grating emitter in order to achieve nearly a factor of two improvement in emission efficiency.
Mid-infrared 2D nonredundant optical phased array of mirror emitters in an InGaAs/InP platform

Jason Midkiff,Po-Yu Hsiao,Patrick T. Camp,Ray T. Chen

2024-04-13

Abstract:The extension of photonic technologies such as lidar and free-space optical communications from the traditional visible and near-infrared wavelengths to longer wavelengths can improve performance in adverse environments such as haze, fog, smoke, or strong solar background. Non-mechanical beam steerers will be a critical component of the low size, weight, and power modules needed for the portable or unmanned systems deployed in these environments. In this work, we demonstrate the first 2D optical phased array for non-mechanical beam steering in the mid-infrared spectral region. We combine a total internal-reflection mirror emitter with a non-redundant array of 30 elements to carry out 2D beam steering at a single wavelength of 4.6 $\mu$m. The experiment yielded 600 resolvable far-field points, with 2400 points over a $28^\circ \times 28^\circ$ field of view calculated theoretically. Moreover, the device was fabricated in a passive InGaAs/InP platform, contributing another advance in the ongoing development of quantum cascade laser-based photonic integration.

Optics,Applied Physics
Large-scale optical phased array using a low-power multi-pass silicon photonic platform

Steven A. Miller,You-Chia Chang,Christopher T. Phare,Min Chul Shin,Moshe Zadka,Samantha P. Roberts,Brian Stern,Xingchen Ji,Aseema Mohanty,Oscar A. Jimenez Gordillo,Utsav D. Dave,Michal Lipson

DOI: https://doi.org/10.1364/OPTICA.7.000003

IF: 10.4

2020-01-01

Optica

Abstract:Optical phased arrays are a promising beam-steering technology for ultra-small solid-state lidar and free-space communication systems. Long-range, high-performance arrays require a large beam emission area densely packed with thousands of actively phase-controlled, power-hungry light emitting elements. To date, such large-scale phased arrays have been impossible to realize since current demonstrated technologies would operate at untenable electrical power levels. Here we show a multi-pass photonic platform integrated into a large-scale phased array that lowers phase shifter power consumption by nearly 9 times. The multi-pass structure decreases the power consumption of a thermo-optic phase shifter to a P-pi of 1.7 mW/pi without sacrificing speed or optical bandwidth. Using this platform, we demonstrate a silicon photonic phased array containing 512 actively controlled elements, consuming only 1.9 W of power while performing 2D beam steering over a 70 degrees x 6 degrees field of view. Our results demonstrate a path forward to building scalable phased arrays containing thousands of active elements. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Grating Lobe-Free Silicon Optical Phased Array with Periodically Bending Modulation of Dense Antennas

Dong Liang,Wenlei Li,Xiaobin Wang,Xu Zhao,Zichen Guo,Xiang'e Han,Jingye Chen,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.479150

IF: 3.8

2023-01-01

Optics Express

Abstract:A grating lobe-free silicon optical phased array with large field of view is demonstrated. Antennas with periodically bending modulation are spaced at half wavelength or less. The experimental results show that the crosstalk between adjacent waveguides is negligible at 1550 nm wavelength. Additionally, to reduce the optical reflection caused by the sudden change of refractive index at the output antenna of the phased array, tapered antennas are added to the output end face so that more light will be coupled into the free space. The fabricated optical phased array shows a field of view of 120° without any grating lobes.

Integrated optical phased array at 2μm wavelength band on silicon

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Millimeter-Long Silicon Photonic Antenna for Optical Phased Arrays at 2-μm Wavelength Band

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

A Flexible on-chip phase calibration method for optical phased array

Increasing Wavelength-Controlled Steering Range of an Optical Phased Array by Using Two Subarrays.

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Two-dimensional Silicon Optical Phased Array with Large Field of View.

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering

Mid-infrared 2D nonredundant optical phased array of mirror emitters in an InGaAs/InP platform

Large-scale optical phased array using a low-power multi-pass silicon photonic platform

Grating Lobe-Free Silicon Optical Phased Array with Periodically Bending Modulation of Dense Antennas