Design of a Microwave-Induced Atmospheric-Pressure Plasma Source Based on Cylindrical Resonant Cavity TM010 Mode

Tao Liu,Xianyu zhang,Li WU,Junwu Tao,Wencong Zhang

DOI: https://doi.org/10.1088/1361-6463/ad9594

2024-01-01

Journal of Physics D Applied Physics

Abstract:Abstract A microwave-induced low-temperature atmospheric-pressure source based on cylindrical resonant cavity TM010 mode was designed. The microwave power was fed into the cavity from a rectangular waveguide on its top through a coupling hole. A metal pin with adjustable insertion depth was added in the cavity to tune its resonant frequency. The fed waveguide was connected with a sliding short. By tuning the sliding short, the energy transfer efficiency from waveguide to the cavity was changed. Experiments showed that it can induce an argon discharge in the resonant cavity at atmospheric pressure with as low as 30 W microwave input power without any extra trigger. The plasma length could reach 50 mm as the input power was 200 W. By exciting the argon with an extra ignitor in the feeding waveguide, the length of plasma plume could extend to 260 mm when the input power was 800 W. The plasma generated by this device were filamentous for both cases. The emission spectrum proved the uniformity of the plasma along its length. This work is helpful to provide a new alternative microwave plasma device for waste gas treatment or chemical reactions that require plasma catalysis.