Design of a Flexible Microwave-Induced Room-Temperature Atmospheric-Pressure Microplasma Source

Tao Liu,Xianyu Zhang,Wencong Zhang,Junwu Tao,Xian Liu,Li Wu
DOI: https://doi.org/10.1109/tps.2024.3376526
IF: 1.368
2024-01-01
IEEE Transactions on Plasma Science
Abstract:A microwave-induced room-temperature atmospheric-pressure flexible microplasma source based on a resonant microstrip array structure was designed. This device was a simple structure with a small size, low power requirement, and flexibility. The utilization of a resonant microstrip was to reduce the excitation power requirement and plasma temperature. An array structure was adopted to achieve a larger plasma area. Experiments showed that it can induce an argon discharge at atmospheric pressure with as low as 20 W microwave input power. The temperature was around 30 $^{\circ}$ C. This device was designed to be suitable to manipulate different material treatments without being affected by the shape of the material itself.
physics, fluids & plasmas
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