Microwave field distribution in a new atmospheric pressure microwave plasma (APMP) system

Liang Liu,Guixin Zhang,Zhijie Zhu,Yinan Li
DOI: https://doi.org/10.1109/PLASMA.2006.1707229
2006-01-01
Abstract:Summary form only given. The production and maintenance of microwave plasma under the atmospheric condition have always been the major concern of researches. Some scientists used waveguide as cavity to produce a plasma jet, while the mass of microwave plasma was relatively hard to receive in atmospheric pressure. However, a few research institutes and companies have already developed mass of atmospheric pressure microwave plasma (APMP), such as CYRANNUS series, which can be widely applied. In this paper, we design a system to excite mass of APMP, emulate the chamber through software and measure the microwave field distribution to validate. This research can build a theoretical basis of microwave plasma excitation position and other characteristics under one atmospheric pressure. It will be useful in further study of the APMP
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