Abstract:This article investigated the discharge characteristics of Ar plasma sustained by a coaxial plasma jet under different microwave frequencies (433 MHz, 915 MHz, 2450 MHz and 5800 MHz). Clear distinctions of the discharge properties like ignition and plasma-sustaining power, shape, electron number density, electron temperature and so on, were experimentally obtained under these operating frequencies. The results demonstrated that the higher the microwave frequency is, the lower the ignition and the plasma-sustaining powers are. However, the dropping tendency of powers was not linear to the increase of microwave frequency. The Ar plasma under the microwave radiation at the frequency of 5800 MHz exhibited an upside-down “bell” shape and a larger cross-section, while those at other three frequencies seemed to have thin and long plumes. The higher the microwave frequency, the fatter the plasma plumes. The investigation of electron temperature, electron number density and gas temperature revealed that all these parameters enhance with the increase of microwave frequency up to 2450 MHz but reduce at 5800 MHz, even though the power efficiency elevate monotonously with frequency. This study is supposed to be helpful to determine the optimal frequency and design microwave plasma sources for certain applications.

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