Evaluations of Electron Density and Temperature in Atmospheric-Pressure Radio-Frequency Helium Plasma Jet

Shou-Zhe Li,De-Zhen Wang,Wen-Chao Zhu,Yi-Kang Pu
DOI: https://doi.org/10.1143/jjap.45.9213
IF: 1.5
2006-01-01
Japanese Journal of Applied Physics
Abstract:In this study, the electrical discharge characteristics of an atmospheric-pressure helium plasma jet using radio-frequency power supply are investigated by measuring the electrical parameters (voltage, current, power, and phase angle). The plasma parameters (electron temperature and electron density) are estimated on the basis of the electrical experiment data using the equivalent circuit model and the power balance equation. By varying input power, a “phase saturation” region is identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40 slpm in the experiment.
What problem does this paper attempt to address?