Emission Spectroscopy Diagnosis and Discharge Characteristics Distribution Analysis of High-Frequency, High-Enthalpy Inductive Coupling Plasma Generator
Yue Niu,Weimin Bao,Donglin Liu,Xiaoping Li,Yanming Liu
DOI: https://doi.org/10.1016/j.vacuum.2023.112847
IF: 4
2024-01-01
Vacuum
Abstract:To study the electromagnetic properties through reentry plasma on ground, a large-sized inductive coupled plasma generator is designed to produce a long-duration, large size and high temperature plasma flow in a low-pressure vacuum tank. Among all plasma parameters, the spatial distribution of electron density and electron temperature is of utmost importance for analyzing the electromagnetic scattering properties. In this study, we used the emission spectroscopy diagnosis method to explore the aforementioned parameters at two locations: upflow and downflow of the discharge coil in the plasma generator. Experiments were conducted under various discharge conditions for argon, with the panel power ranging from 28 kW to 85 kW. The results showed that, at the upflow of the discharge coil, the electron temperature at the center was higher than that at the edge, exhibiting an arch-shaped profile. However, at the downflow of the discharge coil, the electron temperature at the center was lower than that at the edge, exhibiting a saddle-shaped profile. The electron density exhibited a completely opposite distribution compared to the electron temperature, with higher values at the edge for upflow and higher values at the center for downflow. By varying the panel power, we observed the similar phenomenon: the electron temperature decreased, while the electron density increased with the increase in power. Finally, brief analysis was provided at the end of the paper. This study offered valuable insights into the transition of plasma distribution in a plasma generator, providing a reference for future research on the propagation of electromagnetic waves in plasma sheaths.