Design And Fabrication Of A Resonant-Cavity Electrode Microwave Discharge Device And Its Performance In Argon And Xenon Plasma

Zhongkai Zhang,Yu Liu,Jinxiang Cao,Pengcheng Yu,Xiao Zhang,Jian Wang
DOI: https://doi.org/10.1063/1.5108514
IF: 1.6
2019-01-01
Review of Scientific Instruments
Abstract:A new configuration of a resonant-cavity electrode microwave discharge device is developed in this work. In the device, a hollow electrode antenna is used for microwave transporting, and a well-designed resonant-cavity could enhance the absorption of the microwave power. A quartz cover is adopted to seal the vacuum and insulate the antenna from plasma, which greatly reduces the heat accumulation on the antenna. A magnetic field coil made by multiple-turn enameled wires is designed which could generate a strong magnetic field based upon a low-current power supply. In the plasma chamber, a distinctive L-shape probe is designed to measure the parameter distribution, and the two-dimensional parameters can be measured with the simple structure. In addition, the characteristic parameters such as electron density and temperature are measured in the chamber with a single probe, and the electron density distribution and spectrum are compared in argon and xenon plasma, which suggests that the microwave plasma device has good adaptability and functionality. Published under license by AIP Publishing.
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