Selective Surface Patterning of Si3N4 Ceramic by Ultrasonic Waves

Suliu Yi,Zhuolin Li,Xiaoguo Song,Jian Wang,Yue Shi,Shoujing Wei
DOI: https://doi.org/10.1016/j.surfin.2024.105423
IF: 6.2
2024-01-01
Surfaces and Interfaces
Abstract:In this study, selective surface patterning of Si3N4 ceramic substrates using Zn-6Al solder at the low processing temperature of 430 °C was successfully achieved by ultrasonic waves, which made the Si3N4 substrates possible to be connected with the devices directly. It was verified that a sono-oxidation reaction occurred at the Si3N4/Zn-6Al interface during the ultrasonic surface patterning process, forming a nano-scale amorphous Al2O3 layer at this interface with an average thickness of 8 nm. Such an interfacial sono-oxidation reaction dramatically bestowed Zn-6Al solder with good weldability on Si3N4 ceramic, and the maximum interconnect strength between them reached up to 92.3 MPa.
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