Enhancement of Electromigration Performance of Molybdenum Nanowires by CoMo Capping

Sijie Gu,Haijun Cheng,Chun-Feng Hu,Xin-Ping Qu
DOI: https://doi.org/10.1109/iitc61274.2024.10732447
2024-01-01
Abstract:The electromigration performance of the Mo nanowires with different capping layers is measured. Results show that the CoMo capped Mo nanowires show better electromigration performance than that of the ones capped with Si 3 N 4 or SiO 2 . It is found that the CoMo capping layer can effectively protect the Mo film from oxidation as well as nitridation, which is the main reason for the improved EM performance of the Mo nanowires.
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