A Thorough Study on the Effect of 3-Mev Proton Irradiation on the Performance of AlGaN/GaN HEMTs

Tian Zhu,Xuefeng Zheng,Hao Zhang,Ling Lv,Shaozhong Yue,Taixu Yin,Xiaohu Wang,Yanrong Cao,Tan Wang,Tao Han,Xiaohua Ma,Yue Hao
DOI: https://doi.org/10.1109/ted.2024.3471986
IF: 3.1
2024-01-01
IEEE Transactions on Electron Devices
Abstract:This work thoroughly investigates the effects of proton irradiation on the electrical performances of the AlGaN/GaN high-electron-mobility-transistors (HEMTs), especially on RF, OFF-state drain-source breakdown, and thermal characteristics. RF output power ( P-out ) and gain decrease after proton irradiation at higher input power. Degraded P-out further leads to a reduced power added efficiency (PAE). Moreover, irradiated devices exhibit an increased thermal resistance ( R-TH ). Contrary to the degraded dc, RF, and thermal characteristics, an improvement in OFF-state drain-source breakdown voltage (BVDS ) is observed after proton irradiation. Combined with the trap characterization results, it can be concluded that the degradation in dc and RF characteristics and the improvement in BVDS are related to the proton-induced generation of the acceptor traps with energy levels of E-C -0.56 eV and E-C -0.94 eV in and near the channel in the GaN layer and with an energy level of E-C -0.97 eV in the AlGaN layer. Further discussions indicate that the traps generated in the GaN layer and SiC substrate after proton irradiation can contribute to the increase in R-TH .
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