Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

Erratum: an Approach for Determining Equivalent Circuit Model of On‐chip Inductors

An Approach For Determining Equivalent Circuit Model Of On-Chip Inductors (Vol 55, Pg 2363, 2013)

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

Compact Equivalent Circuit Model Of Two-Layer Spiral Inductors

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

A derived circuit model for spiral inductors on lossy silicon substrate

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

A Physics-Aware Methodology for Equivalent Circuit Model Extraction of TSV-inductors

A Novel Compact Model for On-Chip Vertically-Coiled Spiral Inductors

An improved equivalent circuit model for predicting the transmission characteristics of spiral inductors on GaAs substrates

Accurate Model for Micromachined Microwave Planar Spiral Inductors

Global Performance Evaluation of Various On-Chip Square Spiral Inductors on Gaas Substrates

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Electrical Characteristics and Behavioral Model of Spiral Inductors On Gaas Substrate

Modeling of Double-Π Equivalent Circuit for On-Chip Symmetric Spiral Inductors

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Frequency-Independent Asymmetric Double-Pi Equivalent Circuit For On-Chip Spiral Inductors: Physics-Based Modeling And Parameter Extraction

Analysis of modeling approaches for on-chip spiral inductors

A Scalable Model of On-chip Inductor Including Tunable Dummy Metal Density Factor

A Wideband Predictive “Double-$\Pi$ ” Equivalent-Circuit Model for On-Chip Spiral Inductors

Vertical Topologies of Miniature Multispiral Stacked Inductors