Polymer-Derived Ceramics Thin-Film Plasma Anemometer with High Resistance to Plasma Sputtering

Hongcheng Wei,Haoran Li,Peng Zhang,Weitao Jiang,Daoheng Sun,Qinnan Chen
DOI: https://doi.org/10.1109/jsen.2024.3409533
IF: 4.3
2024-01-01
IEEE Sensors Journal
Abstract:Due to the poor plasma sputtering resistance of PVD thin-film plasma anemometer electrodes, the working life of the sensor is short and the repeatability of the output signal is poor, which greatly restricts the practical process of the plasma thin-film anemometer. PDCs have excellent high temperature mechanical properties, high temperature stability, oxidation resistance, electrical properties, and superior processing and molding characteristics, is expected to solve the above problem. In this paper, we use PDCs to prepare plasma thin-film anemometers, and carry out a comparison experiment with PVD thin-film plasma anemometer. The results show that the PDCs thin-film plasma anemometer has better sputtering resistance, and can continue to work for more than 2.5h at a current of 7~8mA, and the signal fluctuation does not exceed 2.48%. And its high temperature resistance is up to 900° C. In addition, we carried out static calibration and repeatability test on the PDCs thin-film plasma anemometer. The speed measurement range can reach 150m/s on the alumina substrate with the sensitivity of 16.7μA/(m/s). After 6 rounds of outbound and return repeated tests, the error is controlled within 5%. By using PDCs process to prepare plasma thin-film anemometer, the working life and signal repeatability of the sensor are greatly improved, which provides an important support for the development of plasma thin-film anemometer.
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