Integrated Fabrication of High-Temperature Microelectromechanical System Sensor on Aeroengine Turbine Blade
Franklin Li Duan,Jibao Li,Junchao Gao,Guifu Ding,Xuaqiang Cao
DOI: https://doi.org/10.2514/1.t5147
2018-01-01
Journal of Thermophysics and Heat Transfer
Abstract:No AccessTechnical NoteIntegrated Fabrication of High-Temperature Microelectromechanical System Sensor on Aeroengine Turbine BladeFranklin Li Duan, Jibao Li, Junchao Gao, Guifu Ding and Xueqiang CaoFranklin Li DuanShanghai Jiao Tong University, 200240 Shanghai, People's Republic of China, Jibao LiAVIC Commercial Aircraft Engine Company, Ltd., 201108 Shanghai, People's Republic of China, Junchao GaoHuawei Technologies Company, Ltd., 200240 Shanghai, People's Republic of China, Guifu DingShanghai Jiao Tong University, 200240 Shanghai, People's Republic of China and Xueqiang CaoWuhan University of Technology, 430070 Hubei, People's Republic of ChinaPublished Online:5 Apr 2018https://doi.org/10.2514/1.T5147SectionsRead Now ToolsAdd to favoritesDownload citationTrack citations ShareShare onFacebookTwitterLinked InRedditEmail About References [1] "The Versatile Affordable Advanced Turbine Engines Program," AIAA Air Breathing Propulsion Technical Committee, Jan. 2006, http://www.aiaa.org/uploadedfiles/issues_and_advocacy/policy_papers/position_papers/vaate.pdf [retrieved 2018]. 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All requests for copying and permission to reprint should be submitted to CCC at www.copyright.com; employ the ISSN 0887-8722 (print) or 1533-6808 (online) to initiate your request. See also AIAA Rights and Permissions www.aiaa.org/randp. TopicsAeronauticsAvionicsGuidance, Navigation, and Control SystemsIntegrated CircuitsRobot SensorsSemiconductor DevicesSensorsTransducers KeywordsSensor TechnologyTurbine BladesMicroelectromechanical SystemsAeroengineThin FilmsElectrical InsulationPhysical Vapor DepositionPhotolithographyTemperature SensorsIntegrated CircuitsAcknowledgmentsThis work is sponsored by the cooperative project GO0030002 between the Aviation Industry Corporation of China and Shanghai Jiaotong University in China. The work is the cooperative effort of a group of people at both Shanghai Jiaotong University and the Chinese Aero-Engine Company, Ltd. Special thanks are given to C. C. Zhang, P. Cheng, H. Wang, and X. L. Zhao at Shanghai Jiaotong University and J. Shao and Q. Wang at the Chinese Commercial Aircraft Engine Company, Ltd. in Shanghai.PDF Received4 December 2016Accepted3 February 2018Published online5 April 2018