Chalcogenides Phase Change Materials for PICs

Kai Xu,Maoliang Wei,Kunhao Lei,Boshu Sun,Yiting Yun,Junying Li,Lan Li,Hongtao Lin
DOI: https://doi.org/10.1109/siphotonics60897.2024.10543829
2024-01-01
Abstract:A "zero-change" platform for monolithic back-end-of-line integration of phase-change materials (PCM) in silicon photonics was proposed and high performance nonvolatile PCM/Si heterogeneous integrated devices based on Sb2Se3 and Ge2Sb2Se4Te1 were demonstrated.
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