Improving the Dynamic Range and Resolution of Mems Resonant Sensors Utilizing Nonlinear Cancellation

Chengxin Li,Aojie Quan,Hemin Zhang,Chen Wang,Mustafa Mert Torunbalci,Linlin Wang,Chenxi Wang,Yangyang Guan,Yuan Wang,Michael Kraft

2023-01-01

Abstract:In this paper, improvements on the dynamic range and resolution of MEMS (Micro-electromechanical systems) resonant sensors are demonstrated using a nonlinear cancellation method. The fabricated MEMS resonator shows obvious mechanical nonlinear behavior due to spring hardening. A DC tuning voltage forces the device to enter an intermediate regime between the mechanical and electrostatic nonlinear regimes, resulting in a higher linear vibration amplitude compared to the maximum linear amplitude (MLA), i.e., critical amplitude. The experimental results show that the input referred resolution can be improved by a factor of 7 and the dynamic range is enhanced by 6 dB, respectively, when nonlinear cancellation is applied.