Mutual cancellation phenomenon of the nonlinearities in micro-machined double-clamped beams resonator

Dongyang Chen,Xuyin Chen,Yangyang Guan,Yong Wang,Zhonggui Xu,Yinshen Wang,Hongyun Lin,Huicong Liu,Jin Xie
DOI: https://doi.org/10.1109/memsys.2018.8346728
2018-01-01
Abstract:In this work, a cancellation phenomenon between mechanical and electrical nonlinearities has been observed in a parallel-plate driven double ended tuning forks (DETF) resonator, which is used to reduce overall nonlinearity in the premise of operational restriction on the excitation conditions. An improved method has been proposed to cancel the inherent nonlinearity by introducing additional nonlinearity with inside tuning capacitors on the comb drive DETF resonator. The improved method makes the reduction tunable meanwhile alleviates the discontinuity of the frequency spectrum to enhance frequency stability and quality factor. The cancellation can partially eliminate the nonlinearities that contribute to a wider linear regime and higher power handling of the resonator.
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