Abstract:Functional single‐crystalline films with mechanical flexibility have attracted intensive interest due to excellent material quality and the wide applications in flexible electronics. However, the free‐standing single‐crystalline films with the thickness in sub‐micrometer range usually deform due to insufficient mechanical strength or internal stress. This study introduces a strain balanced model (SBM) of a sandwich structure and an ion slicing‐based strain compensation bonding method for fabricating ultrathin but self‐supporting single‐crystalline thin films. Based on the SBM and the strain compensation bonding method, a centimeter‐scale strain balanced LiNbO3 (LN) thin film (SB‐LNTF) consisting of two pieces of 550 nm single‐crystalline LN film and an intermediate layer of benzocyclobutene is successfully fabricated. In additional to flat, bendable, transparent, and lightweight, the fabricated ultrathin (<10 µm) SB‐LNTF also exhibits excellent self‐supporting property. Standard piezoresponse force microscopy amplitude butterfly curve and a 180° phase switching associated with ferroelectric behavior of LN film are observed, which confirm its high crystal quality of the ion sliced LiNbO3 thin film. A flexible acoustic resonator demonstrated on SB‐LNTF shows strong resonances. In principle, the strain compensation bonding method is also applicable to epitaxial lift‐off films. A strain‐balanced model of a sandwich structure and a strain compensation bonding method for fabricating ultrathin but self‐supporting films is introduced. A centimeter‐scale strain‐balanced film (<10 µm) consisting of two single‐crystalline LiNbO3 thin films and an intermediate layer of benzocyclobutene is demonstrated, which exhibits excellent properties of flat, bendable, transparent, lightweight, and self‐supporting.

An Enhanced Strain Response in Micrometer-Thick BNT-ST Thin Films

Ultra-high strain responses in lead-free (Bi0.5Na0.5)TiO3-BaTiO3-NaNbO3 ferroelectric thin films

Thickness Dependent Dielectric and Piezoelectric Properties of BNT–BT–ST Thin Films

Enhancement of Piezoelectricity in Spin-Coated Bi1/2Na1/2TiO3-BaTiO3 Epitaxial Films by Strain-Engineering

The Effect of Stress on the Piezoelectric Properties of BNT–BT–ST Thin Films

Thickness-dependent Switching Behavior of 0.8(Bi0.5na0.5)tio3-0.2Srtio3 Lead-Free Piezoelectric Thin Films

Strain Balanced Self‐Supporting Single‐Crystalline LiNbO 3 Thin Films for Flexible Electronics

Thickness-dependent flexoresistance in SrTiO3 thin films

Investigation of Thickness Dependence of Electric Properties of Sol-Gel Bnt-Bt Thin Films with Stepwise Crystallization

Giant electromechanical strain response in lead‐free SrTiO3‐doped (Bi0.5Na0.5TiO3–BaTiO3)–LiNbO3 piezoelectric ceramics

Enhanced Dielectric and Piezoelectric Properties of (100) Oriented Bi0.5Na0.5TiO3–BaTiO3–SrTiO3 Thin Films

Strain performance and thickness-induced asymmetry in SrTiO 3 doped BNT-based lead-free ferroelectrics from nonergodic to ergodic phase

Enhanced Dielectric and Piezoelectric Properties in Lead-Free Bi0.5Na0.5TiO3–BaTiO3–SrTiO3 Thin Films with Seed Layer

Nanoscale structure and mechanism for enhanced electromechanical response of highly-strained BiFeO3 thin films

Enhancement of piezoelectricity in spin-coated Bi<sub>1/2</sub>Na<sub>1/2</sub>TiO<sub>3</sub>-BaTiO<sub>3</sub> epitaxial films by strain engineering

Constrained Sintering and Electrical Properties of BNT–BKT Lead-Free Piezoceramic Thick Films

Modulation of Phase Boundary and Domain Structures to Engineer Strain Properties in BNT-based Ferroelectrics

Large piezoelectric properties of (1 − x)Na 0.5 Bi 0.5 TiO 3 –xBaTiO 3 thin films prepared by sol–gel method

The optimization of electric properties of multilayered BNT–BT–ST/BCST thin films by configuration

Enhanced Ferroelectric Functionality in Flexible Lead Zirconate Titanate Films with In-Situ Substrate-Clamping Compensation

Grain Size Dependent Electrostrain in Bi1/2na1/2tio3-Srtio3 Incipient Piezoceramics