A High-Gain Cladded Erbium-Doped LNOI Waveguide Amplifier Fabricated by PLACE

Youting Liang,Junxia Zhou,Zhaoxiang Liu,Haisu Zhang,Zhiwei Fang,Yuan Zhou,Difeng Yin,Jintian Lin,Jianping Yu,Rongbo Wu,Min Wang,Ya Cheng
DOI: https://doi.org/10.1109/cleo-pr62338.2022.10432272
2022-01-01
Abstract:Erbium doped integrated waveguide amplifier based on thin film lithium niobate on insulator (LNOI) is fabricated using photolithography assisted chemo-mechanical etching technique (PLACE). A thin cladding layer of tantalum pentoxide (Ta 2 O 5 ) is deposited on the fabricated LNOI waveguide which boosts the small-signal internal net gain exceeding 20 dB. Experimental characterizations reveal the advantage of Ta 2 O 5 cladding in higher optical gain compared with the amplifier without cladding. The demonstrated high-gain LNOI amplifier holds great promise in lightwave communication, optical sensing and metrology.
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