Surface Photo Voltage (SPV) Type NO, NO<sub>2</sub> Gas Sensor Fabricated by Mesoporous Materials with Uniform Pore Size and Ordered Pore Structure

Takeo Yamada,Haoshen Zhou,Itaru Honma,Masato Tomita,Yuko Ueno,Hidekazu Uchida,Teruaki Katsube
DOI: https://doi.org/10.1541/ieejsmas.123.118
2003-01-01
Abstract:The mesoporous materials SBA-15 and SBA-16 from the self-assembled template organic framework inorganic compound materials are successfully prepared with powder and film states. The powder state of mesoporous material exhibit a variety of properties and possibilities of these kinds of materials. The film state of these SBA-15 and SBA-16 are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO and NO2 gas sensing properties dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application.
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