A Possibility Of Block-Copolymer Templated Mesoporous Silica Films Applied To Surface Photo Voltage (Spv) Type Nox Gas Sensor

T Yamada,Hs Zhou,H Uchida,M Tomita,Y Ueno,T Katsube,I Honma
DOI: https://doi.org/10.1016/s0167-2991(03)80500-1
2003-01-01
Abstract:A self-ordered hexagonal and cubic-like mesoporous silica film has been successfully fabricated from a Metal-Insulator-Semiconductor device applied to a Nitrogen oxides (NOx) gas sensor based on the surface photo voltage system. These self-ordered mesoporous silica films are synthesized by using a nonionic triblock copolymer surfactant as a template in spin coating. The sensing characteristics as a NOx gas sensor are dependent on both mesostructures and exposure gases.
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