An Application Possibility of Self-Ordered Mesoporous Silicate for Surface Photo Voltage (SPV) Type NO Gas Sensor (II): Self-Ordered Mesoporous Silicate Incorporated SPV Device and Its Sensing Property Dependence on Mesostructure

T Yamada,HS Zhou,H Uchida,M Tomita,Y Ueno,K Asai,I Honma,T Katsube
2002-01-01
IEICE Transactions on Electronics
Abstract:Self-ordered mesoporous silicate films from organic-inorganic compound materials are successfully fabricated into the surface photo voltage (SPV) type gas sensor device as a gas adsorption insulator layer. These kinds of gas sensors device exhibit NO gas sensing property dependent on their mesoporous film structure. We are succeeded in indication about a possibility of mesoporous silicate film for the SPV type gas sensor application.
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