Preparation Of High Performance Room Temperature Voc Gas Sensors

Brian Yuliarto,Nugraha,Haoshen Zhou
2009-01-01
Abstract:Metal oxide- modified mesoporous MCM-41 thin films were investigated as a VOC gas sensor at room temperature employing surface photovoltage technique. The self-ordered and structure controlled of metal oxide-modified mesoporous MCM-41 were first prepared by a molecule surfactant template method using spin coating. In this research report, the various VOC gas sensor was successfully investigated by tin-doped nanoporous silica using surface photovoltage technique. Self-ordered and structure controlled transparent films of tin-doped nanoporous silica were prepared by a molecule surfactant template method using spin coating. Surface photo voltage (SIN) VOC gas sensor was then fabricated by the self-ordered tin-doped nanoporous silica thin films based on a metal-insulator-semiconductor (MIS) structure. The sensitivity of tin-doped nanoporous silica was obtained at the various VOC gas from 200 800 ppm at room temperature.
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