Novel Structural TilAI-based Ohmic Contacts on AIGaN/GaN Heterostructures

Jinyan Wang,C. P. Wenl,Yangyuan Wang
2008-01-01
Abstract:To improve the performances of ohmic contacts for GaN devices, a novel multilayer TilAI-based metal scheme (TilAI/TilAI/TilAI/TiiAI/NilAu) on undoped AIGaN/GaN heterostructures was employed. A contact with pc (specific contact resistance) of 8.74E-07 .Q·cm2, Rc of 0.22 .Q·mm was demonstrated. Ohmic contacts with the novel metal structure were measured with I-V, SEM, HRTEM to show their properties. The results showed that ohmic contacts with novel structures have better surface morphology and proposed thermal stability than those using conventional TilAI/NilAu metal scheme, therefore ohmic contacts with novel structures should be better candidates for high power and high frequency GaN devices.
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