Abstract:Copper (Cu) is an important interconnect metal material in the semiconductor field. While removing excess copper in the chemical mechanical polishing process, it is necessary to add corrosion inhibitors to the slurry to protect copper from excessive corrosion. Numerous studies have shown that the heteroatoms and functional groups of corrosion inhibitors are crucial factors affecting their corrosion inhibition ability. The corrosion inhibition performance of benzimidazole (BI) and its two derivatives, 5-methyl benzimidazole (MBI) and 5-methyl benzotriazole (MBTA), on copper in glycine + N-methylglycine solution at pH 9 was studied, and their structure-activity relationship was revealed. Electrochemical measurements and adsorption isotherm fittings show that the three corrosion inhibitors cover the copper surface mainly through the chemisorption to prevent the anodic reaction of copper. The corrosion inhibition efficiencies of BI, MBI, and MBTA were 97.22%, 98.00% and 98.73% at the concentration of 8 mM, respectively, reaching their maximum values. The contact angle testing reveals that MBI and MBTA containing methyl groups are relatively more hydrophobic. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and scanning electron microscope (SEM) results confirm that the three corrosion inhibitors were successfully adsorbed on the copper surface and formed a dense passivation film to protect the copper from corrosive solutions. In addition, a multi-module collaboration with density functional theory (DFT) and molecular dynamics (MD), further demonstrates that BI, MBI, and MBTA are all adsorbed on the copper layer in a mixed way, and MBTA has the strongest binding capacity to copper. The introduction of the methyl and N atom increased the adsorption area and attachment sites between the corrosion inhibitor and copper, which coincides with the experimental results.

Synergistic Effect of Polyaspartic Acid and Malamine on Copper

Synergy effect of polyaspartic acid and D-phenylalanine on corrosion inhibition caused by Desulfovibrio vulgaris

Electrochemical Studies of Polyaspartic Acid and Sodium Tungstate As Corrosion Inhibitors for Brass and Cu30Ni Alloy in Simulated Cooled Water Solutions

Synthesis of a polyaspartic acid/4-(2-aminoethyl) morpholine graft copolymer and evaluation of its scale and corrosion inhibition performance

Glutamic Acid Enhances the Corrosion Inhibition of Polyaspartic Acid on Q235 Carbon Steel

SERS studies of synergetic effect in corrosion inhibition for Cu by a two-component inhibitor system of polyvinylimidazole and benzimidazole

Surface-enhanced Raman Scattering and Cyclic Voltammetry Studies of Synergetic Effects in the Corrosion Inhibition of Copper by Polybenzimidazole and Mercaptobenzimidazole at High Temperature

Inhibition effect and mechanism of polyacrylamide for steel corrosion in simulated concrete pore solution

Effectiveness of an amine-based inhibitor—guanidine for steel in chloride-contaminated concrete

A Combined Inhibiting Effect of Sodium Alginate and Sodium Phosphate on the Corrosion of Magnesium Alloy Az31 in Nacl Solution

Synergistic inhibition of azoles compounds on chloride-induced atmospheric corrosion of copper: Experimental and theoretical characterization

Synergistic inhibition effect of L-Phenylalanine and zinc salts on chloride-induced corrosion of magnesium alloy: Experimental and theoretical investigation

Functional polyaspartic acid derivatives as eco-friendly corrosion inhibitors for mild steel in 0.5 M H 2 SO 4 solution.

Chemical, electrochemical, and quantum investigation into the use of an organophosphorus derivative to inhibit copper corrosion in acidic environments

Synergistic corrosion inhibition study of Armco iron in sodium chloride by piperidin-1-yl-phosphonic acid–Zn2+ system

Synthesis of polyaspartic acid-melamine grafted copolymer and evaluation of its scale inhibition performance and dispersion capacity for ferric oxide

Computational Foretelling and Experimental Implementation of the Performance of Polyacrylic Acid and Polyacrylamide Polymers as Eco-Friendly Corrosion Inhibitors for Copper in Nitric Acid

Corrosion inhibition effect of benzimidazole and two derivatives on copper in alkaline environments: experimental and theoretical analyses

Two common antihistamine drugs as high-efficiency corrosion inhibitors for copper in 0.5M H2SO4

Polydopamine/Silane Composite Coating on Electrolytic Copper Foil as Epoxy Adhesion Promoter and Corrosion Inhibitor

Synergistic effect of new imidazoline derivative and 2‐aminopyridine as corrosion inhibitors for Q235: Experimental and theoretical study