Highly Manufacturable 65nm McFET (Multi-Channel Field Effect Transistor) SRAM Cell with Extremely High Performance

Sung Min Kim,Eunchul Yoon,Min Sang Kim,Ming Li,Chang Woo Oh,Sung Young Lee,Kyongmin Yeo,Sung Hwan Kim,Dong-Ok Choe,Sung Dae Suk,Dong‐Won Kim,Donggun Park
2006-01-01
Abstract:We demonstrate highly manufacturable Multi-channel Field Effect Transistor (McFET) on bulk Si wafer. McFET shows excellent transistor characteristics, such as 5~6 times higher drive current than planar MOSFET, ideal subthreshold swing, low drain induced barrier lowering (DIBL) without pocket implantation and negligible body bias dependency, maintaining the same source/drain resistance as that of a planar transistor due to the unique feature of McFET. And suitable threshold voltage (V T ) for SRAM operation and high static noise margin (SNM) are achieved by using TiN metal gate electrode.
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