An Indentation Method for Nanoprecision Measurement of Diamond Tool Edge Radius

Qing Li,MS Rahman,Ming Liu,C CHAN
2002-01-01
Abstract:In ductile mode cutting of brittle materials using di amond tools, such as ductile cutting of silicon and quartz for wafer fabrication , one of the key conditions for achieving ductile chip formation is to get the r ight ratio of tool cutting edge radius to the undeformed chip thickness. It has been shown that the undeformed chip thickness has to be in the order of nanomete rs and that the tool cutting edge radius has to be smaller than the undeformed c hip thickness. Therefore, nanoprecision measurement ...
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