An integrated method for measurement of diamond tools based on AFM

Xiaobin Yue,Dajiang Lei,Hailong Cui,Xiaofeng Zhang,Min Xu,Lingbao Kong
DOI: https://doi.org/10.1016/j.precisioneng.2017.04.021
IF: 3.315
2017-01-01
Precision Engineering
Abstract:•An integrated measurement and characterization method for diamond tools based on AFM has been proposed.•Multiple parameters including edge sharpness, micro defects, surface roughness and tip arc waviness of diamond tools can be measured.•Equipment including AFM, precision adjustment device and aerostatic bearings has been established.•The edge sharpness, micro-defects, surface roughness and tip arc waviness of diamond tools have been obtained by the established system.•Experimental results show that the measurement accuracy meets the requirements of the diamond tool edge profile.
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