Abstract:When the AFM cantilever is mounted with a sharp diamond tip, in addition to controlling both the applied normal load on the tip and other machining parameters by the AFM electrical components, it is capable of conducting micro/nanomachining on the surface of single crystal silicon. Firstly in this research work the diamond tip based single asperity cutting experiments are conducted on silicon surface with different normal loads and cutting speed, in aiming to investigate the AFM based microcutting process and material removal mechanism for silicon-like brittle material on nanoscale. Secondly, the micro/nano-machining experiments are conducted on single crystal silicon surface with different detecting approaches for characterizing the features of the micro/nano-machined region in terms of material removal mechanism and chips forming characteristic under different normal loads. Furthermore, the contact interaction mechanism existed between the AFM diamond tip and the machined silicon surface during the micro/nano-machining process is simulated with finite element method. Finally, the wear mechanism of an atomic force microscope (AM diamond tip when conducting micro/nano-machining on a single crystal silicon surface is empirically analyzed. The results indicate that the AFM based micro/nano-machining has a precisely dimensional controllability and a good surface quality on nanometer scale.

Controlled Monolayer Self-Assembly Process Based on the Atomic Force Microscopy Nanoscratching Method

Preparation of Self-Assembly Monolayer by Scratching Si(100) Surface in the Presence of Aryl Diazonium Salts

Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

Experimental Study on Self-assembly Process Based on Micro-Probe Mechanical Scratching Technology

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Preparation and Tribological Behaviors of an Amide-Containing Stratified Self-Assembled Monolayers on Silicon Surface

Nano-fabrication System Based on Atomic Force Microscopy

Molecular Dynamics Study on the Mechanism of AFM-based Nanoscratching Process with Water-Layer Lubrication

Fabrication of Functional Structures at Si (100) Surface by Mechanical Scribing in the Presence of Aryl Diazonium Salts

Preparation and Characterization of 1-Hexadecene Thin Film on Silicon Surface

Fabrication of Nanopatterns on Silicon Surface by Combining AFM-Based Scratching and RIE Methods

Active Control of Surface Integrity in Thin Film Scratching and Finishing

Friction-induced Nanofabrication on Monocrystalline Silicon

AFM-Based Nanoscratch System

Atomic Force Microscope Using a Diamond Tip: a Tool for Micro/nanomachining on Single-Crystal Silicon Surface

Direction-identical Scratching Method for Fabricating Nanostructures Using a Modified AFM Nanoscratching System

On the deformation mechanism of SiC under nano-scratching: An experimental investigation

Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

Molecular dynamics simulation of AFM scratching on silicon with varying load

Fabrication of Nanochannels with Complex Three-Dimensional Structures Based on a Modified Atomic Force Microscopy Nanoscratching System

Surface Modifications with Lissajous Trajectories Using Atomic Force Microscopy