Blue Light Emitted from Porous Silicon Obtained by Hydrothermal Etching

Qianwang Chen,Jingsheng Zhu,Guien Zhou,Zi-Fan Song,X. G. Li,Yuheng Zhang
DOI: https://doi.org/10.1088/0953-8984/8/49/006
1996-01-01
Journal of Physics Condensed Matter
Abstract:Light emitting porous silicon (LEPSi) was prepared by hydrothermal etching of p-type single-crystal silicon. This sample preparation, which does not involve electrochemical etching followed by a rapid thermal oxidation (RTO) process in a dry oxygen ambient, yields blue light emission, the wavelength of the photoluminescence (PL) band peaking at 430 nm. The blue-emission porous silicon (PS) with high mechanical hardness is easily obtained by this technique. Our results are interpreted in terms of the currently suggested theories.
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