PC-based LED Epi-wafers NDT Scanning System

Hongsan Sun
2009-01-01
Abstract:A new smart LED epi-wafers nondestructive scanning system that based on PC was introduced. Using software to analyze, the measurement results of epi-wafers' key performance parameters could be got immediately. The function of film thickness measurement was added to the system. This PC-based intelligent system could realize LED wafer nondestructive, rapid and accurate on-line scanning.
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