The Scanning Laser Fluorescence Spectrometer

Dong Zhanmin,SU Zhe,Ling Yong,Han Li,CHEN Haoming
DOI: https://doi.org/10.3321/j.issn:0254-3087.2001.01.017
2001-01-01
Abstract:A new intelligent laser-induced fluorescence spectrometer was developed.Using the instrument,the large size semiconductor sample could be scanned spot by spot and the whole information about the fluorescence spectrum of sample was acquired immediately.All of these measurements were nondestructive.As an example,this instrument was used to detect the fluorescence property of eptiaxial layer of LED chip.The luminescent fluorescence images of 256×256 dots in two-inch chip can be acquired in the instrument.
What problem does this paper attempt to address?