Preparation of V_2O_5 Semiconductor Thin Films from Induststrial V_2O_5

Yang Shao

2002-01-01

Abstract:Employment Panzhihua Iron Steel Corp. industrial V 2O 5 as material and V 2O 5 sol-gel is produced by a inorganic sol-gel method, and employment these colloid for preparation transparent semiconductor V 2O 5 thin films on different substrates. The influence of colloid viscosity on coating thin films is studied,and the influence of temperature and drying and thickness of films on resistivity is studied also. The microcosmic shape of thin films with scanning electron microscope(SEM), and its composition and change with XRD. The result is:the folluwing colloid viscosity has greater influence on Coating films;Temperature, wet share and thickness of thin films have greater influence on resistance of thin films;V 2O 5 thin films'compositions form acicular V 2O 5 particle, it present even distribution on the substrate,and its structure is relatively dense, its particle diameter size is 0.5～1.0 μm and length size is 3 0～5 0μm. After drying handling particle outline is vague, its structure is sparse and its size grows up, at the same time, some new chemical compounds of vanadium form. V 2O 5 thin film is very sensitive to temperature and humidity, which is a good heat-sensing and humidity-sensing semiconductor film material.