Simple Method Preparation for Ultrathin VO2 Thin Film and Control: Nanoparticle Morphology and Optical Transmittance
Jingxin Sang,Pengfei Wang,Yifan Meng,Xiaofeng Xu,Jia-Lin Sun,You Wang,Zhiwei Hua,Tan Zheng,Zheng Liu,Chunrui Wang,Binhe Wu,Xiaoshuang Chen
DOI: https://doi.org/10.7567/1347-4065/ab0713
IF: 1.5
2019-01-01
Japanese Journal of Applied Physics
Abstract:Nanoscale morphology of vanadium dioxide (VO2) thin films can be controlled to realize smooth ultrathin crystalline films (<10 nm) with a simple way of DC sputtering. Here, crystallization annealing conditions determine whether a continuous ultrathin film or nanoparticle morphology is obtained. The experiments show that ultrathin VO2 thin films possess both a highly crystal orientation (020) and an obvious metal-insulator transition (MIT). Meanwhile, optical transmittance between the visible and near-infrared regions can be modulated by thin film thickness, and the strain in the VO2 lattice is also found to be dependent on the thin film thickness. The 8 nm thickness thin film shows that the change of resistance and visible transmittance is 2.8 orders of magnitude and 77.5%, respectively.