Multi-physics Simulations for Nanoscale CMOS Reliability

Xiaoyan Liu,Mengqi Fan,Jinghan Xu,Fei Liu
DOI: https://doi.org/10.23919/sispad57422.2023.10319536
2023-01-01
Abstract:Multi-scale and multi-physics simulation methods are developed to investigate various reliability problems including trap-induced degradation, self-heating effect and electromigration of interconnects.
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