Simulation Methods of Multi-physics Effects in Nano-scale CMOS

Xiaoyan Liu,Mengqi Fan,Yuanzhao Hu,Haoling Li,Fei Liu,Jinfeng Kang
DOI: https://doi.org/10.1109/IEDM45625.2022.10019403
2022-01-01
Abstract:Complex multi-physics effects in advanced CMOS pose great challenges to the modeling and simulation of devices and circuits. Multi-scale and multi-physics simulation methods are proposed aiming to investigate and evaluate various reliability problems (self-heating effect, trap-induced degradation and electro-migration of interconnects) with maximum accuracy and efficiency.
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