Study on PA Cells for MEMS PA Gas Sensors

Yiping Huang
2006-01-01
Abstract:Photoacoustic(PA) gas sensors have many advantages in gas tracing.It has great practical significance to fabricate MEMS photoacoustic sensors that can reduce the cost and improve the performances.According to the theory of PA sensors,a PA cell has been developed with MEMS techniques,and its behavior has been simulated as well.The conclusions provide very important bases for realizing MEMS PA gas sensors.
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