Ti/DLC Multilayer Synthesized Using Plasma Immersion Ion Implantation and Deposition

Lei Yang
2009-01-01
Abstract:Ti/DLC multilayer was synthesized on 2Cr13 substrate using plasma immersion ion implantation and deposition (PⅢD). Structure and mechanical performance were characterized. The results showed that the multilayer has a good periodicity. The micro-hardness of the multilayer was improved obviously compared with the single-layer film. The multilayer with relatively low micro-hardness exhibited high adhesion strength and wear resistance. It can be concluded that the multilayer not only maintains the low coefficient characteristic of the single DLC film,but also improves the load bearing capacity and the adhesion strength between the film and substrate.
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