Mechanical Properties of Diamond-Like Carbon-Based Multilayer Coatings

马峰,蔡珣,陈秋龙,李刚,马洪涛
DOI: https://doi.org/10.3321/j.issn:1006-2467.2003.02.027
2003-01-01
Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University
Abstract:The hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PIII) was adopted to fabricate diamond-like carbon-based functionally gradient N/TiN/Ti(N,C)/DLC multilayer coatings on the 304 stainless steel substrate. The structure characterization and mechanical properties of the multilayer coatings were analyzed by GXRD, Raman spectroscopy and nano-indenter. The results show that the hardness and elastic modulus, fracture toughness and interfacial fracture toughness of N/TiN/Ti(N,C)/DLC multilayer coating are about 19.84 GPa, 190.03 GPa, 3.75 MPa·M 1/2 and 5.68 MPa·M 1/2, respectively. Compared with that of DLC monolayer and C/TiC/DLC multilayer, this DLC Multilayer coating has better qualities as a solid lubricating coating.
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