Abstract:In this paper,a 4×4 optical switch matrix based on free carrier dispersion effect is designed and fabricated on silicon-on-insulator(SOI) water by a 0.8 μm standard commercial CMOS line.It consists of four electro-optic 2×2 multimode imaging-based Mach-Zehnder interferometers.As a basic unit,the proposed switch matrix can be extended to n×n matrix switch and used in both optical space-division and optical time-division switching networks.The two paired MMIs in each Mach-Zehnder structure are used as 3 dB power splitters and combiners.Each switching element is electrically driven with an independent extermal power supply.By injecting free carriers into phase shifter with the active forward P-i-n diode,the π phase shift required for switching action is achieved.Experimental results show that the 4×4 silicon photonic switch matrix has the crosstalk level lower than-8.02 dB with a common spectral bandwidth as large as 35 nm,which is from 1 530 nm to 1 565 nm.Furthermore,when a specific square-wave signal with 10%-90% transition time of 5 ns is loaded,the switching response time is measured to be 17.4 ns for the rising edge and 21 ns for the falling edge,respectively.

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&Lt;title>design and Fabrication of MMI-MZI Optical Switch in GaAs/GaAIAs</title>

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