Calibration of a QMS System for High-Sensitivity Gas Permeation Measurement

Runqing Wu,Lincong Zhang,Kun Cao,Song Tian,Xiao-Dong Zhang,Rong Chen
DOI: https://doi.org/10.1109/tim.2023.3300429
IF: 5.6
2023-01-01
IEEE Transactions on Instrumentation and Measurement
Abstract:Measurement of gas permeation with high sensitivity and reliability is important for many applications. A high-sensitivity gas permeation measurement system based on quadrupole mass spectrometry (QMS) was calibrated using standard flows of various gases, including helium, nitrogen, and water vapor, which were introduced from a porous standard leak. For the condensable gas of water vapor, its flow through the nanoporous channels of the leak was found to be affected by capillary condensation, which leads to ~28% reduction in flow rate. Utilizing the standard leak, trace fluxes of moisture can be generated to mimic standard water vapor transmission rate (WVTR) as low as 3.98e −6 g/m2/day. Calibration measurement reveals power-law sensor response to the introduced standard flow of each gas; such correlation between QMS signal and gas flow appears to be independent of the test sample, but instead more intrinsic instrument factors. Furthermore, the calibration improves the reliability of the QMS-based instrument for the measurement of WVTR down to the 1e −6 g/m2/day level, with measurement uncertainty quantified to be ~10.7%.
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