Abstract:High-density embedded nonvolatile memory (eNVM) at advanced technology nodes is still in great demand for SOC chips used in consumer electronics, self-driving cars, industrial control, and IoT edge devices. Although embedded NOR Flash is still main stream, its process complexity and high integration cost make it difficult to scale beyond 28nm. RRAM has become a promising alternative owing to its excellent scalability, low power, and compatibility with logic processes [1 –6]. However, several challenges still exist that restrict RRAM from practical eNVM applications, as shown in Fig. 24.2.1. 1) a high supply voltage is needed, because of high operation voltages and a considerable voltage drop on write path. 2) The IR drop on write path varies significantly with the distance of a cell from the peripheral circuits. 3) Prior self-write termination (SWT), with its abrupt cutoff, fails to form dense conductive filaments (CFs). While delayed termination helps to alleviate this issue, its delay time is not optimized for fast and slow cells [3]. 4) Previous read reference schemes that use a small number of HRS/LRS cells may collapse when encountering tail bits, resulting in a poor reference [6]. In this work, we demonstrate a 1Mb 14nm-FinFET RRAM with a $0.022 \\mu m^{2}$ cell size. The cell array is in a deep N-well with adequate P-substrate biasing to alleviate the difficulty of high voltage transfer. Placing the bit line (BL) and source line (SL) drivers on the top and bottom of the array reduces the IR-drop variation for near and far cells. Self-adaptive delayed termination (SADT) adjusts the termination time according to cell characteristics (fast or slow), helping to generate robust CFs. A read reference with multiple dummy 1T1R cells avoids the reference collapse issue. The test chip supports reliable read operation at a minimum supply voltage of 0.5V from $-40^{\\circ}C$ to $125^{\\circ}C$.

Highly Reliable and Manufacturable MRAM embedded in 14nm FinFET node.

A 14nm-Finfet 1mb Embedded 1t1r Rram With A 0.022 Mu M(2) Cell Size Using Self-Adaptive Delayed Termination And Multi-Cell Reference

13.2 A 14nm FinFET 128Mb 6T SRAM with VMIN-enhancement techniques for low-power applications

Impacts of External Magnetic Field and High Temperature Disturbance on MRAM Reliability Based on FPGA Test Platform.

Magnetic Random Access Memory (MRAM)

High-density Magnetoresistive Random Access Memory Operating at Ultralow Voltage at Room Temperature

A Logic-Process Compatible RRAM with 15.43 Mb/mm<sup>2</sup> Density and 10years@150°C retention using STI-less Dynamic-Gate and Self-Passivation Sidewall

Addressing Failure and Aging Degradation in MRAM/MeRAM-on-FDSOI Integration

24.2 A 14nm-FinFET 1Mb Embedded 1T1R RRAM with a 0.022µm<sup>2</sup> Cell Size Using Self-Adaptive Delayed Termination and Multi-Cell Reference

A 3.75mb Embedded RRAM IP on 40nm High-Voltage CMOS Technology

Reliability-Improved Read Circuit and Self-Terminating Write Circuit for STT-MRAM in 16 nm FinFET

A Dynamic Reference Scheme to Improve the Sensing Reliability of Magnetic Random Access Memory

Mixed etching-oxidation process to enhance the performance of spin-transfer torque MRAM for high-performance computing

The reliability of FeRAMS with 2T/2C or 1T/1C type cell structure

Fabrication of Magnetic Random Access Memory Based on Nanoring-Type Magnetic Tunnel Junctions and Spin-Polarized Current Driving

FeRAM using Anti-ferroelectric Capacitors for High-speed and High-density Embedded Memory

A High Throughput In-MRAM-Computing Scheme Using Hybrid P-Sot-mtj/gaa-cntfet

BEOL Based RRAM with one extra-mask for low cost, highly reliable embedded application in 28 nm node and beyond

A 22-nm 1-Mb 1024-b Read Data-Protected STT-MRAM Macro With Near-Memory Shift-and-Rotate Functionality and 42.6-GB/s Read Bandwidth for Security-Aware Mobile Device

A 28nm 1.5mb Embedded 1T2R RRAM with 14.8 Mb/mm2 Using Sneaking Current Suppression and Compensation Techniques

Highly Manufacturable 65nm McFET (Multi-Channel Field Effect Transistor) SRAM Cell with Extremely High Performance